|
|
 |
 |
|
|
|
| Type of material |
|
|
| symbol |
|
|
| thermal expansion |
|
| Soda-lime
glass |
SL |
94~10|7 |
| Synthetic
quartz |
QZ |
5~10|7 |
|
|
|
| Material |
|
|
| SL QZ |
|
| Flatness |
2micrometer |
5micrometer |
7micrometer |
10micrometer |
15micrometer |
|
|
|
| Name |
|
HRP |
Cr |
|
| size(mm) |
|
|
| thickness(mm) |
|
|
| size(mm) |
|
|
| thickness(mm) |
|
| 2506 |
63.0}0.4 |
1.6}0.2 |
63.1}0.4 |
1.5}0.1 |
| 3006 |
75.8}0.4 |
1.6}0.2 |
75.8}0.4 |
1.5}0.1 |
| 4006 |
101.2}0.4 |
1.6}0.2 |
101.2}0.4 |
1.5}0.1 |
| 4009 |
|
1.6}0.2 |
101.2}0.4 |
2.3}0.1 |
| 5006 |
126.6}0.4 |
1.6}0.2 |
|
|
| 5009 |
|
|
126.6}0.4 |
2.3}0.1 |
| 6009 |
|
|
152.0}0.4 |
2.30}0.1 |
| 7012 |
|
|
177.4}0.4 |
3.05}0.1 |
|
|
|
 |
General standard of photo-mask inspection |
|
|
| Heading |
|
|
| specification |
|
type
of mask |
|
| chrome master mask |
|
|
| chrome copy mask |
|
| Short size inspection |
guarantee
area (inch) |
Σsubstrate
size-0.5 |
Σsubstrate
size-0.5 |
| a: minimum size or specified size
unit micro meter
|
a
5 |
}0.3 |
}0.3 |
| 5a
10 |
}0.4 |
}0.5 |
| 10a
20 |
}0.5 |
}0.7 |
| 20a
50 |
}0.7 |
}1.0 |
| 50a |
}1.0 |
}1.5 |
|
| Heading |
|
|
| specification |
|
type
of mask |
|
| chrome master mask |
|
|
| chrome copy mask |
|
| Long
size inspection @ |
guarantee
area (inch) |
Σsubstrate
size-0.5 |
Σsubstrate
size-0.5 |
Mask
size
Unit: micro meter |
3h |
}0.5 |
}1.0 |
| 4h |
}0.75 |
}1.2 |
| 5h |
}0.75 |
}1.2 |
| 6h |
}1.0 |
}1.5 |
| 7h |
}1.0 |
}1.5 |
|
| Heading |
|
|
| specification |
|
type
of mask |
|
| chrome master mask |
|
|
| chrome copy mask |
|
| defect inspection |
guarantee
area (inch) |
Σsubstrate
size-0.5 |
Σsubstrate
size-0.5 |
| unit:
pieces /cm2 |
density of defect |
2.0 |
2.0 |
| standard of judgment |
0.1 |
0.3 |
|
|
| The items on this
table is ordinal mask standard. We can manufacture special standard
mask, for example size spec }0.1 zero defect, chrome mask in
the size of 18"~20",and the mask with pellicle. |
|
|
